Adopting high-throughput X-ray fluorescence (XRF) technology;

Providing composition measurements of various light elements such as B, P, C, O, N, F, etc. is an ideal choice for thin film composition measurements such as BPSG, PSG, FSG, P Doped Poly, CHM, etc;

Also applicable to various metal thin films for logic, advanced storage DRAM, MRAM, VNAND, and multi-layer circuit thin film thickness measurement