Åthena Xcellence® LE Series use high-throughput X-ray fluorescence (XRF) technology, it offers compositional measurement of various light elements such as B, P, C, O, N, F. It is an ideal for measuring the composition of thin films such as BPSG, PSG, FSG, P Doped Poly, CHM. It is also applicable to measurement of thickness of metal films and multi-layer circuit films in logic, advanced storage DRAM, MRAM, VNAND.