产品方案
产品方案
X-ray Diffraction Metrology Åthena Xcellence™ D Series
Provide analysis methods for the lattice structure and film thickness of various Epi materials, such as online or offline measurements of SiGe''''s Stress, Strain, Composition, Relaxation, THK, etc;
Suitable for complex applications such as process development, material stress engineering development, equipment monitoring, and process equipment matching.
WeChat
Shenzhen Angstrom Excellence Technology Co. Ltd All Rights Reserved
ICP:2023084378   44030902004036