Adopting free combination fast X-ray reflection technology (XRR) and X-ray fluorescence technology (GIXRF), grazing incidence angle or conventional incidence angle (XRF);

Can correspond to advanced or mature process thin films, ultrathin films, including measurement of complex multi-layer structures; Provide various parameter measurements for metal films, metal compounds, and some light elements, such as the composition, film thickness, density, roughness, and other parameters of P films.